Micromachined piezoelectric tactile sensor for an endoscopic grasper - theory, fabrication and experiments

Journal of Microelectromechanical Systems

Volumn 9, Issue 3, 2000, Pages 329-335

  Dargahi, J ^a,b,c,d   Parameswaran, M ^b   Payandeh, S ^b  

^a UNIVERSITY OF NEW BRUNSWICK   (Canada)

^b SIMON FRASER UNIVERSITY   (Canada)

^c UNIVERSITY OF GLASGOW   (United Kingdom)

^d AMIRKABIR UNIVERSITY OF TECHNOLOGY   (Iran)

Author keywords

[No Author keywords available]

Indexed keywords

ENDOSCOPY; FINITE ELEMENT METHOD; MICROMACHINING; MICROSENSORS; PIEZOELECTRIC DEVICES; PLASTIC FILMS; SIGNAL TO NOISE RATIO; SILICON; TISSUE; VINYL RESINS;

ENDOSCOPIC GRASPERS; PIEZOELECTRIC TACTILE SENSORS; POLYVINYLEDENE FLUORIDE FILMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0034269558     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.870059     Document Type: Article

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