Micromachined VO2-based uncooled IR bolometric detector arrays with integrated CMOS readout electronics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2882, Issue , 1996, Pages 111-121

  Jerominek, Hubert ^a   Renaud, Martin ^a   Swart, Nicholas R ^a   Picard, Francis ^a   Pope, Timothy D ^a   Levesque, Marc ^a   Lehoux, Mario ^a   Bilodeau, Ghislain ^a   Pelletier, Martin ^a   Audet, Danick ^a   Lambert, Philippe ^a  

^a INO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

BOLOMETERS; CMOS INTEGRATED CIRCUITS; FABRICATION; MICROMACHINING; POLYAMIDES; READOUT SYSTEMS; SCANNING; THERMISTORS; VANADIUM COMPOUNDS;

SELF-SCANNING; THERMAL COEFFICIENTS;

INFRARED DETECTORS;

EID: 0030415142     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)