Experimental design and modelling in the investigation of process parameter effects on the tribological and mechanical properties of r.f.-plasma-deposited a-C:H films

Surface and Coatings Technology

Volumn 122, Issue 2-3, 1999, Pages 150-160

  Ronkainen, H ^a   Koskinen, J ^a   Varjus, S ^a   Holmberg, K ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

a C:H; Coating optimization; Experimental design; Mechanical properties; Tribology

Indexed keywords

COATING; DESIGN; FILM LUBRICANT; TRIBOLOGY;

EID: 0033573385     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00380-1     Document Type: Article

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