SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of Crystal Growth

Volumn 233, Issue 4, 2001, Pages 723-729

Experimental design method applied to microwave plasma enhanced chemical vapor deposition diamond films

(2) Hung, C C a Shih, H C a

a NATIONAL TSING HUA UNIVERSITY (Taiwan)

Author keywords

A1. characterization; A3. chemical vapor deposition process; B1. diamond

Indexed keywords

COMPOSITION EFFECTS; HYDROGEN; METHANE; MICROWAVES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY;

MICROWAVE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION (MPECVD);

DIAMOND FILMS;

EID: 0035546549 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-0248(01)01607-4 Document Type: Article

Times cited : (17)

References (28)

1
- 0004173989
- Noyes Publications, Park Ridge, New Jersey
- (1993) Handbook of Carbon, Graphite, Diamond and Fullerenes
- Pierson, H.O.¹

2
- 0000547031
- (1992) IEEE Ultras. Symp. , vol.1 , pp. 377
- Nakahata, H.¹ Hachigo, A.² Shikata, S.³ Fujimori, N.⁴

3
- 0020208230
- (1982) J. Mater. Sci. , vol.17 , pp. 3106
- Matsumoto, S.¹ Sato, Y.² Tsutsumi, M.³ Setaka, N.⁴

4
- 30244501352
- (1983) J. Crystal Growth , vol.62 , pp. 642
- Kamo, M.¹ Sato, Y.² Sato, S.³ Tsutsumi, M.⁴ Setaka, N.⁵

5
- 0021858920
- (1985) Appl. Phys. Lett. , vol.46 , pp. 146
- Sawabe, A.¹ Inuzuka, T.²

6
- 36549100469
- (1987) Appl. Phys. Lett. , vol.50 , pp. 728
- Suzuki, K.¹ Sawabe, A.² Yasuda, H.³ Inuzuka, T.⁴

7
- 0001313014
- (1988) J. Appl. Phys. , vol.63 , pp. 1744
- Chang, C.P.¹ Flamm, D.L.² Ibbotson, D.E.³ Mucha, J.A.⁴

8
- 5544304141
- (1988) Appl. Phys. Lett. , vol.52 , pp. 2043
- Gelii, F.G.¹ Pehrsson, P.E.² Wang, H.T.³ Butler, J.E.⁴

9
- 0009661538
- (1988) Science , vol.241 , pp. 913
- Angus, J.C.¹ Hayman, C.C.²

10
- 0026622175
- (1992) J. Mater. Res. , vol.7 , pp. 105
- Sung, C.P.¹ Shih, H.C.²

11
- 0026849145
- (1992) Surf. Coat. Technol. , vol.52 , pp. 105
- Shih, H.C.¹ Sung, C.P.² Tang, Y.S.³ Chen, J.G.⁴

12
- 0003461881
- (1999) Thin Solid Films , vol.337 , pp. 235
- Takatsuji, H.¹ Arai, T.² Tsuji, S.³ Kuroda, K.⁴ Saka, H.⁵

13
- 0031272195
- (1997) Mater. Chem. Phys. , vol.51 , pp. 190
- Chen, J.M.¹ Tsai, C.L.² Yao, C.Y.³ Sheu, S.P.⁴ Shih, H.C.⁵

14
- 0032308324
- (1998) J. Mater. Process Technol. , vol.84 , pp. 122
- Yang, W.H.¹ Tarng, Y.S.²

15
- 0030265118
- (1996) Mater. Chem. Phys. , vol.46 , pp. 77
- Lin, K.L.¹ Hwang, M.Y.² Wu, C.D.³

16
- 0003938530
- ASI Press, Dearborn, Michigan
- (1993) Taguchi Methods: Design of experiments
- Taguchi, G.¹ Yokoyama, Y.² Wu, Y.³

17
- 0003486756
- Wiley, New York
- (1997) Design and Analysis of Experiments
- Montgomery, D.C.¹

18
- 0004033283
- Mcgraw-Hill companies, New York
- (1996) Taguchi Techniques for Quality Engineering
- Ross, P.J.¹

19
- 0003900849
- Addison-Wesley Publishing Company, Reading, MA
- (1993) Taguchi method: A hands-on approach
- Peace, G.S.¹

20
- 0024620920
- (1985) J. Mater. Res. , vol.4 , pp. 385
- Knight, D.S.¹ White, W.B.²

21
- 0040939687
- (1991) Ann. Rev. Phys. Chem. , vol.42 , pp. 643
- Celii, F.G.¹ Butler, J.E.²

22
- 0000809838
- (1992) Diamond and Relat. Mater. , vol.1 , pp. 422
- Bachmann, P.K.¹ Wiechert, D.U.²

23
- 25944465573
- (1970) Phys. Rev. B , vol.19 , pp. 1688
- Solin, S.A.¹ Ramdas, A.K.²

24
- 4243597147
- (1990) Phys. Rev. B , vol.41 , pp. 3738
- Shroder, R.E.¹ Nemanich, R.J.² Glass, J.T.³

25
- 0003641977
- Marcel Dekker, New York
- (1998) Handbook of Industrial Diamonds and Diamond Films
- Prelas, M.A.¹ Popovici, G.² Bigelow, L.K.³

26
- 0034324317
- (2000) Diamond Relat. Mater. , vol.9 , pp. 1840
- Guo, X.J.¹ Sung, S.L.² Lin, J.C.³ Chen, F.R.⁴ Shih, H.C.⁵

27
- 0001220042
- (1990) J. Chin. Inst. Eng. , vol.13 , pp. 697
- Shih, H.C.¹ Sung, C.P.² Tang, Y.S.³

28
- 0032473185
- (1998) Thin Solid Films , vol.315 , pp. 345
- Sung, S.L.¹ Guo, X.J.² Huang, K.P.³ Chen, F.R.⁴ Shih, H.C.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.