Electrical properties of sputter deposited SrTiO3 gate dielectrics

Journal of the European Ceramic Society

Volumn 24, Issue 6, 2004, Pages 1449-1453

  Liu, Chih Yi ^a   Tseng, Tseung Yuen ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Electrical properties; Films; Gate dielectric; SrTiO3

Indexed keywords

HIGH TEMPERATURE EFFECTS; MAGNETRON SPUTTERING; NITROGEN; OXYGEN; POLYCRYSTALLINE MATERIALS; PRESSURE EFFECTS; SEMICONDUCTOR GROWTH; SILICON; SPUTTER DEPOSITION; STRONTIUM COMPOUNDS; THIN FILMS;

GATE DIELECTRICS; INTERFACIAL LAYERS;

DIELECTRIC MATERIALS;

ELECTRICAL PROPERTY;

EID: 0942291203     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0955-2219(03)00537-5     Document Type: Article

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