Formation of metastable c-AlN and its effect on the mechanical properties of AlN/(Ti,Al)N nanoscale multilayers

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 6, 2003, Pages 2411-2414

  Hu, Xiaoping ^a   Yu, Xiaojiang ^a   Lao, Jijun ^a   Li, Geyang ^a   Gu, Mingyuan ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALS; ELASTIC MODULI; EPITAXIAL GROWTH; HARDNESS; HIGH RESOLUTION ELECTRON MICROSCOPY; LATTICE CONSTANTS; MAGNETRON SPUTTERING; MICROSTRUCTURE; MULTILAYERS; TITANIUM NITRIDE; X RAY DIFFRACTION ANALYSIS;

METASTABLE PHASES; MODULATION PERIODS;

ALUMINUM NITRIDE;

EID: 0942278375     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1624270     Document Type: Article

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