Influence of postdeposition annealing on crystallinity of zinc oxide films

Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors

Volumn 24, Issue 7, 2003, Pages 729-736

  Lu, Jianguo ^a   Ye, Zhizhen ^a   Huang, Jingyun ^a   Zhao, Binghui ^a   Wang, Lei ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

Annealing model; Crystallinity; Postdeposition annealing; ZnO films

Indexed keywords

ANNEALING; MAGNETRON SPUTTERING;

CRYSTALLINITY; POSTDEPOSITING ANNEALING; ZINC OXIDE FILMS;

ZINC OXIDE;

EID: 0742319103     PISSN: 02534177     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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