Kinetic models for thermal decompositions of amorphous carbon and carbon nitride thin films

Journal of Physics Condensed Matter

Volumn 15, Issue 47, 2003, Pages 8081-8093

  Li, Yuan Qing ^a   Zhang, Lihong ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; AMORPHOUS MATERIALS; CARBON; CARBON NITRIDE; CHEMICAL BONDS; COMPOSITION; KINETIC ENERGY; MATHEMATICAL MODELS; MOLECULAR STRUCTURE; PYROLYSIS; REACTION KINETICS; SPUTTER DEPOSITION;

AMORPHOUS CARBON; DECELERATORY REACTION KINETICS; SIGMOID REACTION KINETICS; STRUCTURE BONDING RATIOS; THIN CORNING GLASS SUBSTRATES;

THIN FILMS;

EID: 0347622553     PISSN: 09538984     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-8984/15/47/011     Document Type: Article

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