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Volumn 92, Issue 6, 2002, Pages 2962-2968
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Kinetics and mechanisms of laser-induced decompositions of hydrogenated amorphous carbon films on magnetic hard disks
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Author keywords
[No Author keywords available]
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Indexed keywords
APPARENT ACTIVATION ENERGY;
DC MAGNETRON SPUTTERING;
DECOMPOSITION RATE;
EXPONENTIAL EQUATIONS;
FIRST ORDER REACTIONS;
FLUENCE RATES;
HYDROGEN CONTENTS;
HYDROGENATED AMORPHOUS CARBON FILMS;
KINETICS AND MECHANISM;
LASER INDUCED;
LASER POWER;
LASER-INDUCED DECOMPOSITION;
MAGNETIC HARD DISKS;
MICRO BEAMS;
REACTION ORDERS;
STRUCTURAL DECOMPOSITION;
ACTIVATION ENERGY;
CARBON FILMS;
DECOMPOSITION;
LASER OPTICS;
ARGON LASERS;
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EID: 18644386648
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1500790 Document Type: Article |
Times cited : (6)
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References (15)
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