Simulation of H-C-S containing gas mixtures relevant to diamond chemical vapour deposition

Diamond and Related Materials

Volumn 12, Issue 12, 2003, Pages 2178-2185

  Petherbridge, J R ^a   May, P W ^a   Shallcross, D E ^a   Harvey, J N ^a   Fuge, G M ^a   Rosser, K N ^a   Ashfold, M N R ^a  

^a UNIVERSITY OF BRISTOL   (United Kingdom)

Author keywords

Chemical vapour deposition; Gas phase modelling; Sulfur doping

Indexed keywords

CHEMICAL VAPOR DEPOSITION; MASS SPECTROMETRY; MOLECULAR BEAMS; THERMODYNAMICS;

GAS MIXTURES; MOLE FRACTIONS;

DIAMONDS;

DIAMOND;

EID: 0346783207     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(03)00294-2     Document Type: Article

References (44)

1. Spear K.E. Dismukes J.P. Synthetic Diamond-Emerging CVD Science and Technology 1994 Wiley New York
2. May P.W. Philos. Trans. Roy. Soc. London, A 358 2000 473
3. Spitsyn B.V. Bouilov L.L. Derjaguin B.V. J. Cryst. Growth 52 1981 219
4. Okano K. Diamond: Electronic Properties and Applications 1995 Kluwer Academic Publishers Dordrecht
5. Vinocur N. Miller B. Avyigal Y. Kalish R. J. Electrochem. Soc. 143 1996 L238
6. Polyakov V.I. Rukovishnikov A.I. Rossukanyi N.M. Krikunov A.I. Ralchenko V.G. Smolin A.A. et al. Diamond Relat. Mater. 7 1998 821
7. Hasegawa M. Takeuchi D. Yamanaka S. Ogura M. Watanabe H. Kobayashi N. et al. Jpn. J. Appl. Phys. 38 1999 L1519
8. Sakaguchi I. Gamo M.N. Kikuchi Y. Yasu E. Haneda H. Phys. Rev. B 60 1999 R2139
9. Gamo M.N. Yasu E. Xiao C. Kikuchi Y. Ushizawa K. Sakaguchi I. et al. Diamond Relat. Mater. 9 2000 941
10. Gamo M.N. Xiao C. Zhang Y. Yasu E. Kikuchi Y. Sakaguchi I. et al. Thin Solid Films 382 2001 113
11. Kalish R. Reznik A Uzan-Saguy C. Cytermann C. Appl. Phys. Lett. 76 2000 757
12. Eaton S.C. Anderson A.B. Angus J.C. Evstefeeva Y.E. Pleskov Y.V. Electrochem. Solid-State Lett. 5 2002 G65
13. Nakazawa K. Tachiki M. Kawarada H. Appl. Phys. Lett. 82 2003 2074
14. Petherbridge J.R. May P.W. Fuge G.M Robertson G.F. Rosser K.N. Ashfold M.N.R. J. Appl. Phys. 91 2002 3605
15. Petherbridge J.R. May P.W. Fuge G.M Rosser K.N. Ashfold M.N.R. Diamond Relat. Mater. 11 2002 301
16. Sternschulte H. Schreck M. Strizker B. Diamond Relat. Mater. 11 2002 296
17. Rego C.A. Tsang R.S. May P.W. Ashfold M.N.R. Rosser K.N. J. Appl. Phys. 79 1995 7264
18. Tsang R.S. May P.W. Ashfold M.N.R. Rosser K.N. Diamond Relat. Mater. 7 1998 1651
19. Leeds S.M. May P.W. Bartlett E. Ashfold M.N.R. Rosser K.N. Diamond Relat. Mater. 8 1999 1377
20. Petherbridge J.R. May P.W. Pearce S.R.J. Rosser K.N. Ashfold M.N.R. J. Appl. Phys. 89 2001 1484
21. Barber G.D. Yarbrough W.A. J. Am. Ceram. Soc. 80 1997 1560
22. Dandy D.S. Thin Solid Films 381 2001 1
23. Haubner R. Sommer D. Diamond Relat. Mater. 12 2003 298
24. Petherbridge J.R. May P.W. Ashfold M.N.R. J. Appl. Phys. 89 2001 5219
25. R.J. Kee, F.M. Rupley, J.A. Miller, Sandia National Laboratories Report SAND89-8009B (1989)
26. G.P. Smith, D.M. Golden, M. Frenklach, N.W. Moriarty, B. Eiteneer, M. Goldenberg, et al., http://www.me.berkeley.edu/gri⋯ch/
27. Gaussian 98, Revision A.7, M.J. Frisch, G.W. Trucks, H.B. Schlegel, G.E. Scuseria, M.A. Robb, J.R. Cheeseman, et al., Gaussian Inc., Pittsburgh PA, 1998
28. R.J. Kee, F.M. Rupley, J.A. Miller, Sandia National Laboratories Report SAND87-8215B (1994)
29. Ashfold M.N.R. May P.W. Petherbridge J.R. Rosser K.N. Smith J.A. Mankelevich Y.A. Suetin N.V. Phys. Chem. Chem. Phys. 3 2001 3471
30. Gicquel A. Hassouni K. Breton Y. Chenevier M. Cubertafon J.C. Diamond Relat. Mater. 5 1996 366
31. Goodwin D.G. Butler J.E. Prelas M.A. Popovici G. Bigelow L.K. Handbook of Industrial Diamonds and Diamond Films 1998 527-581 Marcel Dekker New York
32. Roth P. Lohr R. Barner U. Combust. Flame 45 1982 273
33. Shum L.G.S. Benson S.W. Int. J. Chem. Kinet. 17 1985 749
34. Humpfer R. Oser H. Grotheer H. Int. J. Chem. Kinet. 27 1995 577
35. Amano A. Yamada M. Hashimoto K. Sugiura K. Nippon Kagaku Kaishi 1983 385
36. Tsang W. Hampson R.F. J. Phys. Chem. Ref. Data 15 1986 1087
37. Baulch D.L. Cobos C.J. Cox R.A. Esser C. Frank P. Just T. et al. J. Phys. Chem. Ref. Data 21 1992 411
38. Nicholas J.E. Amodio C.A. Baker M.J. J. Chem. Soc. Faraday Trans. 1 75 1979 1868
39. Tsuchiya K. Yamashita K. Miyoshi A. Matsui H. J. Phys. Chem. 100 1996 17202
40. Woiki D. Roth P. J. Phys. Chem. 98 1994 12958
41. Scholfield K. J. Phys. Chem. Ref. Data 2 1973 25
42. Good W.D. Lacina J.L. McCullough J.P. J. Phys. Chem. 65 1961 2229
43. Wilson S.H.S. Ashfold M.N.R. Dixon R.N. J. Chem. Phys. 101 1994 7538
44. Ruscic B. Berkowitz J. J. Chem. Phys. 98 1993 2568