Stress evolution during metalorganic chemical vapor deposition of GaN

Applied Physics Letters

Volumn 74, Issue 3, 1999, Pages 356-358

  Hearne, S ^a   Chason, E ^a   Han, J ^a   Floro, J A ^a   Figiel, J ^a   Hunter, J ^a   Amano, H ^b   Tsong, I S T ^c  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b MEIJO UNIVERSITY   (Japan)

^c ARIZONA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0346728728     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123070     Document Type: Article

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