Application of constraint theory to Si-dielectric interfaces in a-Si:H and poly-Si thin film transistors (TFTs)

Journal of Non-Crystalline Solids

Volumn 266-269 B, Issue , 2000, Pages 1335-1339

  Lucovsky, G ^a   Phillips, J C ^b  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

^b LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0346482202     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0022-3093(99)00947-3     Document Type: Article

References (21)

1. J.C. Phillips, J. Non-Cryst. Solids 34 (1979) 153.
2. J.C. Phillips, J. Non-Cryst. Solids 43 (1981) 37.
3. H. He, M.F. Thorpe, Phys. Rev. Lett. 54 (1985) 2107.
4. J.C. Phillips, in: M.F. Thorpe, P. Duxbury (Eds.), Rigidity Theory and Applications, Plenum, New York, 1999, p. 155.
5. G. Lucovsky, J.C. Phillips, J. Non-Cryst. Solids 227 (1998) 1221.
6. J.H. Van der Merwe, J. Appl. Phys. 34 (1963) 123.
7. G. Lucovsky, H. Niimi, Y. Wu, V. Misra, J.C. Phillips, Appl. Phys. Lett. 74 (1999) 2005.
8. V. Misra Z. Wang, Y. Nu, H. Niimi, G. Lucovsky, J.J. Wortman, J.R. Hauser, J. Vac. Sci. Technol. B17 (1999) 1836.
9. S.S. He, D.J. Stephens, R.W. Haymaker, G. Lucovsky, Mater. Res. Soc. Symp. Proc. 284 (1993) 413.
10. S.S. He, D.J. Stephens, G. Lucovsky, Mater. Res. Soc. Symp. Proc. 297 (1993) 871.
11. S.S. He, M.J. Williams, D.J. Stephens, G. Lucovsky, J. Non-Cryst. Solids 164-166 (1993) 731.
12. G. Lucovsky, S.S. He, M.J. Williams, D. Stephens, Microelectronic Engineering 25 (1994) 329.
13. G.N. Parsons, C. Cusano, G. Lucovsky, J. Vac. Sci. Technol. A5 (1987) 1655.
14. G. Lucovsky, H. Yang, H.Z. Massoud, J. Vac. Sci. Technol. B16 (1998) 2191.
15. S.C. Deane, F.J. Clough, W.I. Milne, M.J. Powell, J. Appl. Phys. 73 (1993) 2895.
16. Z. Jing, G. Lucovsky, J.L. Whitten, J. Vac. Sci. Technol. B13 (1995) 1613.
17. Z. Jing, G. Lucovsky, J.L. Whitten, Mater. Res. Soc. Proc. 378 (1995) 851.
18. G. Lucovsky, Z. Jing, D.R. Lee, J. Vac. Sci. Technol. B14 (1996) 2832.
19. G. Lucovsky, A. Banerjee, B. Hinds, B. Claflin, K. Koh, H. Yang, J. Vac. Sci. Tech. B15 (1997) 1075.
20. Z. Lu, M.J. Williams, P.F. Santos-Filho, G. Lucovsky, J. Vac. Sci. Technol. A13 (1995) 607.
21. G. Lucovsky, H. Niimi, Y. Wu, C.G. Parker, J.R. Hauser, J. Vac. Sci. Technol. A16 (1998) 1721.