Novel micromachined pump based on thick-film piezoelectric actuation

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 353-356

  Koch, Michael ^a   Harris, Nick ^a   Evans, Alan G R ^a   White, Neil M ^a   Brunnschweiler, Arthur ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DIFFUSION IN SOLIDS; ETCHING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PIEZOELECTRIC MATERIALS; PRESSURE MEASUREMENT; SCREEN PRINTING; SEMICONDUCTING SILICON; THICK FILM DEVICES;

LEAD ZIRCONATE TITANATE (PZT); MICROPUMPS;

PUMPS;

EID: 0030720584     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)