Thin-film piezoelectric acoustic sensors. Application to the detection of hydrocarbons

Sensors and Actuators, B: Chemical

Volumn 44, Issue 1-3, 1997, Pages 488-494

  Dorojkine, Leonid M ^a   Volkov, Viacheslav V ^a   Doroshenko, V S ^a   Lavrenov, A A ^a,b,c   Mourashov, D A ^a   Rozanov, I A ^a  

^a KURNAKOV INSTITUTE OF GENERAL AND INORGANIC CHEMISTRY   (Russian Federation)

^b Zelenograd Inst for Phys Problems   (Russian Federation)

^c Institute of Microelectronics   (Russian Federation)

Author keywords

Acoustic sensors; Hydrocarbons; Piezoelectric; Thin film

Indexed keywords

HYDROCARBONS; MATHEMATICAL MODELS; PIEZOELECTRIC TRANSDUCERS; THIN FILM DEVICES; VAPORS;

THIN FILM PIEZOELECTRIC ACOUSTIC SENSORS (TFPAS);

CHEMICAL SENSORS;

EID: 0031247548     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(97)00260-8     Document Type: Article

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