Micromachined sensor array using thin film resonators

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn , Issue , 1995, Pages 879-884

  Xia, J ^a   Burns, S ^a   Porter, M ^a   Xue, T ^a   Liu, G ^a   Wyse, R ^a   Thielen, C ^a  

^a IOWA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; ACOUSTIC WAVES; COMPUTER SIMULATION; DESIGN; FINITE ELEMENT METHOD; PALLADIUM COMPOUNDS; PIEZOELECTRICITY; RESONATORS; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; THIN FILM DEVICES; VISCOELASTICITY;

ACOUSTIC WAVE COUPLING; ALUMINUM NITRIDE; HYDROGEN SENSORS; MASON MODEL; MASS LOADING; MICROMACHINED SENSOR ARRAY; THIN FILM RESONATORS;

CHEMICAL SENSORS;

EID: 0029509779     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)