Facile fabrication of 2-dimensional arrays of sub-10 nm single crystalline Si nanopillars using nanoparticle masks

Chemical Communications

Volumn 3, Issue 24, 2003, Pages 3034-3035

  Hong, Young Kyu ^a   Bahng, Jae Ho ^a   Lee, Geunseop ^a   Kim, Hanchul ^a   Kim, Wondong ^a   Lee, Sekyung ^a   Koo, Ja Yong ^a   Park, Jong Il ^b   Lee, Woo Ram ^c   Cheon, Jinwoo ^c  

^a Korea Research Institute of Standards and Science   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^c Yonsei University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COBALT; NANOPARTICLE; POLY(METHYL METHACRYLATE); SILICON;

ARTICLE; COLLOID; CRYSTAL; DENSITY; NANOTECHNOLOGY; TRANSMISSION ELECTRON MICROSCOPY;

EID: 0346250133     PISSN: 13597345     EISSN: 1364548X     Source Type: Journal    
DOI: 10.1039/b310098g     Document Type: Article

References (16)

1. H. I. Liu, D. K. Biegelsen, F. A. Ponce, N. M. Johnson, R. F. W. Pease, Appl. Phys. Lett., 1994, 64, 1383
2. A. G. Nassiopoulos, S. Grigoropoulos, D. Papadimitriou, Appl. Phys. Lett., 1996, 69, 2267
3. D. M. Pooley, H. Ahmed, H. Mizuta, K. Nakazato, Appl. Phys. Lett., 1999, 69, 2191
4. C. A. Canaria, M. Huang, Y. Cho, J. L. Heinrich, L. I. Lee, M. J. Shane, R. C. Smith, G. M. Miskelly, M. J. Sailor, Adv. Funct. Mater., 2002, 12, 495
5. W. Chen, T. Ahmed, Appl. Phys. Lett., 1993, 63, 1116
6. T. Tada, A. Hamoudi, T. Kanayama, K. Koga, Appl. Phys. Lett., 1997, 70, 2538
7. C. Haginoya, M. Ishibashi, K. Koike, Appl. Phys. Lett, 1997, 71, 2934
8. C.-W. Kuo, J.-Y. Shiu, P. Chen, G. A. Somorjai, J. Phys. Chem. B, 2003, 107, 9950
9. P. A. Lewis, H. Ahmed, T. Sato, J. Vac. Sci. Technol. B, 1998, 16, 2938
10. P. A. Lewis, H. Ahmed, J. Vac. Sci. Technol. B, 1999, 17, 3239
11. C. B. Murray, D. B. Norris, M. G. Bawendi, J. Am. Chem. Soc., 1993, 115, 8706
12. X. Peng, J. Wickham, A. P. Alivisatos, J. Am. Chem. Soc., 1998, 120, 5343
13. S.-M. Lee, S.-N. Cho, J. Cheon, Adv. Mater, 2003, 15, 441
14. S. Sun, C. B. Murray, J. Appl. Phys., 1999, 85, 4325
15. Y.-K. Hong, H. Kim, G. Lee, W. Kim, J.-I. Park, J. Cheon, J.-Y. Koo, Appl. Phys. Lett., 2002, 80, 844
16. J.-I. Park, N.-J. Kang, Y.-W. Jun, S. J. Oh, H.-C. Ri, J. Cheon, ChemPhysChem, 2002, 3, 543