SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Applied Surface Science

Volumn 138-139, Issue 1-4, 1999, Pages 383-387

Characterization of Si-rich a-Si 1-X N X :H alloys deposited by laser-CVD

(6) Banerji, N a Serra, J a Chiussi, S a Lusquinos F a Leon B a Perez Amor M a

a UNIVERSITY OF VIGO (Spain)

Author keywords

Ammonia; Amorphous hydrogenated silicon nitride; ArF photolysis; Disilane

Indexed keywords

EID: 0345920835 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(98)00430-9 Document Type: Article

Times cited : (3)

References (13)

1
- 0031247832
- F. Giorgis, C.F. Pirri, E. Tresso, Thin Solid Films 307 (1997) 298-305.
- (1997) Thin Solid Films , vol.307 , pp. 298-305
- Giorgis, F.¹ Pirri, C.F.² Tresso, E.³

2
- 0030563445
- F. Giorgis, P. Rava, R. Galloni, R. Rizzoli, C. Summonte, G. Crovini, F. Demichelis, C.F. Pirri, E. Tresso, V. Rigato, J. Non-Cryst. Solids 198-200 (1996) 596-600.
- (1996) J. Non-Cryst. Solids , vol.198-200 , pp. 596-600
- Giorgis, F.¹ Rava, P.² Galloni, R.³ Rizzoli, R.⁴ Summonte, C.⁵ Crovini, G.⁶ Demichelis, F.⁷ Pirri, C.F.⁸ Tresso, E.⁹ Rigato, V.¹⁰

3
- 0030085204
- F. Demichelis, G. Crovini, F. Giorgis, C.F. Pirri, E. Tresso, J. Appl. Phys. 79 (3) (1996) 1730-1735.
- (1996) J. Appl. Phys. , vol.79 , Issue.3 , pp. 1730-1735
- Demichelis, F.¹ Crovini, G.² Giorgis, F.³ Pirri, C.F.⁴ Tresso, E.⁵

4
- 0031094415
- B.G. Budaguan, D.A. Stryahilev, A.A. Aivazov, J. Non-Cryst. Solids 210 (1997) 267-274.
- (1997) J. Non-Cryst. Solids , vol.210 , pp. 267-274
- Budaguan, B.G.¹ Stryahilev, D.A.² Aivazov, A.A.³

5
- 0032026754
- N. Banerji, J. Serra, S. Chiussi, F. Lusquiños, B. León, M. Pérez-Amor, Surf. Coat. Technol. 100/101 (1998) 393-397.
- (1998) Surf. Coat. Technol. , vol.100-101 , pp. 393-397
- Banerji, N.¹ Serra, J.² Chiussi, S.³ Lusquiños, F.⁴ León, B.⁵ Pérez-Amor, M.⁶

6
- 0024067201
- T. Sugii, T. Ito, H. Ishikawa, Appl. Phys. A 46 (1988) 249-253.
- (1988) Appl. Phys. A , vol.46 , pp. 249-253
- Sugii, T.¹ Ito, T.² Ishikawa, H.³

7
- 0026107516
- T. Druesedau, St. Jaeger Fiedler, H. Sobotta, H. Riede, V. Boettcher, R. Witzmann, J. Non-Cryst. Solids 127 (1997) 165-173.
- (1997) J. Non-Cryst. Solids , vol.127 , pp. 165-173
- Druesedau, T.¹ Jaeger Fiedler, St.² Sobotta, H.³ Riede, H.⁴ Boettcher, V.⁵ Witzmann, R.⁶

8
- 0029250873
- J. Serra, T. Szörényi, D. Fernández, P. González, E. Garcia, J. Pou, B. León, M. Pérez Amor, Appl. Surf. Sci. 86 (1995) 294.
- (1995) Appl. Surf. Sci. , vol.86 , pp. 294
- Serra, J.¹ Szörényi, T.² Fernández, D.³ González, P.⁴ Garcia, E.⁵ Pou, J.⁶ León, B.⁷ Pérez Amor, M.⁸

9
- 33744698387
- W.A. Lanford, M.J. Rand, J. Appl. Phys. 49 (1978) 4.
- (1978) J. Appl. Phys. , vol.49 , pp. 4
- Lanford, W.A.¹ Rand, M.J.²

10
- 0000228280
- E. Bustarret, M. Bensouda, M.C. Habard, J.C. Bruyére, S. Poulin, S.C. Gujrathi, Phys. Rev. B 38 (12) (1988) 8171-8184.
- (1988) Phys. Rev. B , vol.38 , Issue.12 , pp. 8171-8184
- Bustarret, E.¹ Bensouda, M.² Habard, M.C.³ Bruyére, J.C.⁴ Poulin, S.⁵ Gujrathi, S.C.⁶

11
- 0026942049
- B. Fowler, S. Lian, S. Krishnan, L. Jung, C. Li, D. Samara, I. Manna, S. Banerjee, Thin Solid Films 218 (1992) 48-57.
- (1992) Thin Solid Films , vol.218 , pp. 48-57
- Fowler, B.¹ Lian, S.² Krishnan, S.³ Jung, L.⁴ Li, C.⁵ Samara, D.⁶ Manna, I.⁷ Banerjee, S.⁸

12
- 33744690636
- F.J. Comes, S. Chuissi, A. Roth, Proceedings of 6th International Photovoltaic Science and Engineerinng Conference (PVSEC-6), 1992.
- (1992) Proceedings of 6th International Photovoltaic Science and Engineerinng Conference (PVSEC-6)
- Comes, F.J.¹ Chuissi, S.² Roth, A.³

13
- 84953985849
- J. Robertson, Philosoph. Mag. B 69 (2) (1994) 307-326.
- (1994) Philosoph. Mag. B , vol.69 , Issue.2 , pp. 307-326
- Robertson, J.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.