Plasma-based ion implantation

Current Science

Volumn 83, Issue 3, 2002, Pages 237-253

  Möller, Wolfhard ^a   Mukherjee, Subroto ^b  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^b INSTITUTE FOR PLASMA RESEARCH   (India)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0345733478     PISSN: 00113891     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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