Microeconomics of yield learning in semiconductor manufacturing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5043, Issue , 2003, Pages 41-56

  Monahan, Kevin M ^a  

^a KLA TENCOR CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COST EFFECTIVENESS; INSPECTION; LITHOGRAPHY; MATHEMATICAL MODELS; PROCESS CONTROL; PRODUCTIVITY;

GRATING-BASED OVERLAY METROLOGY; MICROECONOMICS; YIELD LOSS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0345303752     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.485288     Document Type: Conference Paper

References (12)

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