Measuring fab overlay programs

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3677, Issue I, 1999, Pages 64-71

  Martin, Rich ^a   Chen, Xuemei ^a   Goldberger, Itzik ^a  

^a KLA TENCOR CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIES; ERROR ANALYSIS; PRODUCT DESIGN;

DIE YIELD LOSS; OVERLAY ERROR; OVERLAY MANAGEMENT;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0032674940     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.350871     Document Type: Conference Paper

References (6)