New approach to correlating overlay and yield

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3677, Issue I, 1999, Pages 208-216

  Preil, Moshe E ^a   McCormack, John F M ^a  

^a KLA TENCOR CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CORRELATION METHODS; DIES; ERROR ANALYSIS; SEMICONDUCTOR DEVICE MODELS;

OVERLAY ERRORS;

INTEGRATED CIRCUIT LAYOUT;

EID: 0032650210     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.350808     Document Type: Conference Paper

References (9)