메뉴 건너뛰기




Volumn 44, Issue 8, 2003, Pages 833-850

Numerical analysis on heat transfer characteristics of a silicon film irradiated by pico-to femtosecond pulse lasers

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE CARRIERS; COMPUTER SIMULATION; ENERGY ABSORPTION; HEAT TRANSFER; IRRADIATION; LASER BEAM EFFECTS; MICROSCOPIC EXAMINATION; MICROSTRUCTURE; THIN FILMS;

EID: 0344826765     PISSN: 10407782     EISSN: 15210634     Source Type: Journal    
DOI: 10.1080/716100525     Document Type: Article
Times cited : (36)

References (21)
  • 1
    • 0001691024 scopus 로고
    • Engineering a Small World from Atomic Manipulation to Microfabrication
    • D. E. Koshland, Engineering a Small World from Atomic Manipulation to Microfabrication, Science, vol. 254, pp. 1300-1342, 1991.
    • (1991) Science , vol.254 , pp. 1300-1342
    • Koshland, D.E.1
  • 2
    • 0000137070 scopus 로고    scopus 로고
    • Microscale Energy Transport in solids
    • in C. L. Tien, A. Majumdar, and F. M. Gerner (eds.), ch.1, Taylor & Francis, Washington, D.C
    • A. Majumudar, Microscale Energy Transport in solids, in C. L. Tien, A. Majumdar, and F. M. Gerner (eds.), Micro-Scale Energy Transport, ch.1, Taylor & Francis, Washington, D.C. 1998.
    • (1998) Micro-Scale Energy Transport
    • Majumudar, A.1
  • 3
    • 0024766459 scopus 로고
    • Computer-Simulated Explosion of Poly-Silicide Links in Laser-Programmable Redundancy for VLSI Memory Repair
    • J. D. Chlipala, L. M. Scarforne, and C. Y. Lu, Computer-Simulated Explosion of Poly-Silicide Links in Laser-Programmable Redundancy for VLSI Memory Repair, IEEE Trans. Electron Devices, vol. 36, pp. 2433-2439, 1989.
    • (1989) IEEE Trans. Electron Devices , vol.36 , pp. 2433-2439
    • Chlipala, J.D.1    Scarforne, L.M.2    Lu, C.Y.3
  • 4
    • 0010318346 scopus 로고
    • High-TcThin Films and Electronic Devices
    • c Thin Films and Electronic Devices, Phys. Today, vol. 44, pp. 64-70, 1991.
    • (1991) Phys. Today , vol.44 , pp. 64-70
    • Simon, R.1
  • 5
    • 0001742082 scopus 로고
    • Laser Method for Synthesis and Processing of Continuous Diamond Films on Nondiamond Substrates
    • J. Narayan, V. P. Godbole, and G. W. White, Laser Method for Synthesis and Processing of Continuous Diamond Films on Nondiamond Substrates, Science, vol. 52, pp. 416-418, 1991.
    • (1991) Science , vol.52 , pp. 416-418
    • Narayan, J.1    Godbole, V.P.2    White, G.W.3
  • 6
    • 0345721310 scopus 로고
    • Picosecond Dynamics of Thermal and Acoustic Transport in Metal Films
    • G. L. Eesley, Picosecond Dynamics of Thermal and Acoustic Transport in Metal Films, Int. J. Thermophys., vol. 11, pp. 811-817, 1990.
    • (1990) Int. J. Thermophys. , vol.11 , pp. 811-817
    • Eesley, G.L.1
  • 7
    • 0030082794 scopus 로고    scopus 로고
    • Laser Induced Damage in GaAs at 1.06 pm wavelength: Surface Effects
    • A. V. Kuanr, S. K. Bansal, and G. P. Srivastava, Laser Induced Damage in GaAs at 1.06 pm wavelength: Surface Effects, Optics Laser Technol., vol. 28, pp. 25-34, 1996.
    • (1996) Optics Laser Technol. , vol.28 , pp. 25-34
    • Kuanr, A.V.1    Bansal, S.K.2    Srivastava, G.P.3
  • 8
    • 0035451604 scopus 로고    scopus 로고
    • Thermal and Mechanical Damage of GaAs in Picosecond Regime
    • A. P. Singh, A. Kapoor, K. N. Tripathi, and G. R. Kumar, Thermal and Mechanical Damage of GaAs in Picosecond Regime, Optics Laser Technol., vol. 33, pp. 363-369, 2001.
    • (2001) Optics Laser Technol. , vol.33 , pp. 363-369
    • Singh, A.P.1    Kapoor, A.2    Tripathi, K.N.3    Kumar, G.R.4
  • 9
    • 0007951110 scopus 로고    scopus 로고
    • Electronic Desorption of Surface Species Using Short-Pulse Lasers
    • L. M. Phinney and C. L. Tien, Electronic Desorption of Surface Species Using Short-Pulse Lasers, ASME J. Heat Transfer, vol. 120, pp. 765-771, 1998.
    • (1998) ASME J. Heat Transfer , vol.120 , pp. 765-771
    • Phinney, L.M.1    Tien, C.L.2
  • 10
    • 0033184611 scopus 로고    scopus 로고
    • Optimization of Laser Parameters for Ultrashort-Pulse Laser Recovery of Stiction-Failed Microstructures
    • K. Fushinobu, L. M. Phinney, Y. Kurosaki, and C. L. Tien, Optimization of Laser Parameters for Ultrashort-Pulse Laser Recovery of Stiction-Failed Microstructures, Numer. Heat Transfer A, vol. 36, pp. 345-357, 1999.
    • (1999) Numer. Heat Transfer A , vol.36 , pp. 345-357
    • Fushinobu, K.1    Phinney, L.M.2    Kurosaki, Y.3    Tien, C.L.4
  • 11
    • 0030268792 scopus 로고    scopus 로고
    • Ultrashort-Pulse Laser Heating of Silicon to Reduce Microstructure Adhesion
    • K. Fushinobu, L. M. Phinney, and N. C. Tien, Ultrashort-Pulse Laser Heating of Silicon to Reduce Microstructure Adhesion, Int. J. Heat Mass Transfer, vol. 39, pp. 3181-3186, 1996.
    • (1996) Int. J. Heat Mass Transfer , vol.39 , pp. 3181-3186
    • Fushinobu, K.1    Phinney, L.M.2    Tien, N.C.3
  • 12
    • 0030574515 scopus 로고    scopus 로고
    • Surface Adhesion Reduction in Silicon Microstructures Using Femtosecond Laser Pulses
    • N. C. Tien, S. Jeong, L. M. Phinney, K. Fushinobu, and J. Bokor, Surface Adhesion Reduction in Silicon Microstructures Using Femtosecond Laser Pulses, Appl. Phys. Lett., vol. 68, pp. 197-199, 1996.
    • (1996) Appl. Phys. Lett. , vol.68 , pp. 197-199
    • Tien, N.C.1    Jeong, S.2    Phinney, L.M.3    Fushinobu, K.4    Bokor, J.5
  • 13
    • 0028534056 scopus 로고
    • Femtosecond Laser Heating of Multi-Layer Metals—I. Analysis
    • T. Q. Qiu and C. L. Tien, Femtosecond Laser Heating of Multi-Layer Metals—I. Analysis, Int. J. Heat Mass Transfer, vol. 37, pp. 2789-2797, 1994.
    • (1994) Int. J. Heat Mass Transfer , vol.37 , pp. 2789-2797
    • Qiu, T.Q.1    Tien, C.L.2
  • 14
    • 85014333979 scopus 로고
    • Heat Transfer Mechanisms during Short-Pulse Laser Heating of Metals
    • T. Q. Qiu and C. L. Tien, Heat Transfer Mechanisms during Short-Pulse Laser Heating of Metals, ASME J. Heat Transfer, vol. 115, pp. 835-841, 1993.
    • (1993) ASME J. Heat Transfer , vol.115 , pp. 835-841
    • Qiu, T.Q.1    Tien, C.L.2
  • 15
    • 0000572650 scopus 로고
    • Kinetics of High-Density Plasmas Generated in Si by 1.06- and 0.53-pm Picosecond Laser Pulses
    • H. M. van Driel, Kinetics of High-Density Plasmas Generated in Si by 1.06- and 0.53-pm Picosecond Laser Pulses, Phys. Rev. B, vol. 35, pp. 8166-8176, 1987.
    • (1987) Phys. Rev. B , vol.35 , pp. 8166-8176
    • Van Driel, H.M.1
  • 16
    • 0041782908 scopus 로고
    • Corrosion in Electronics
    • W. C. Shumay, Corrosion in Electronics, Adv. Mater. Processes, vol. 132, pp. 73-77, 1987.
    • (1987) Adv. Mater. Processes , vol.132 , pp. 73-77
    • Shumay, W.C.1
  • 18
    • 0004259460 scopus 로고
    • Modular Series on Solid State Device, Addison-Wesley, Reading, MA
    • R. F. Pierret, Advanced Semiconductor Fundamentals, Modular Series on Solid State Device, vol. 6, Addison-Wesley, Reading, MA, 1983.
    • (1983) Advanced Semiconductor Fundamentals , vol.6
    • Pierret, R.F.1
  • 19
    • 0021439341 scopus 로고
    • Phenomenological Model for Picosecond Pulse Laser Annealing of Semiconductors
    • D. Agassi, Phenomenological Model for Picosecond Pulse Laser Annealing of Semiconductors, J. Appl. Phys., vol. 55, pp. 4376-4383, 1984.
    • (1984) J. Appl. Phys. , vol.55 , pp. 4376-4383
    • Agassi, D.1
  • 20
    • 0008493368 scopus 로고
    • Effect of Gate Voltage on Hot-Electron and Hot-Phonon Interaction and Transport in a Sub-micron Transistor
    • A. Majumdar, K. Fushinobu, and K. Hijikata, Effect of Gate Voltage on Hot-Electron and Hot-Phonon Interaction and Transport in a Sub-micron Transistor, J. Appl. Phys., vol. 77, pp. 6686-6694, 1995.
    • (1995) J. Appl. Phys. , vol.77 , pp. 6686-6694
    • Majumdar, A.1    Fushinobu, K.2    Hijikata, K.3
  • 21
    • 0019077227 scopus 로고
    • Optical Heating in Semiconductors: Laser Damage in Ge, Si, InSb and GaAs
    • J. R. Meyer, M. R. Kruer, and F. J. Bartoli, Optical Heating in Semiconductors: Laser Damage in Ge, Si, InSb and GaAs, J. Appl. Phys., vol. 51, pp. 5513-5522, 1980.
    • (1980) J. Appl. Phys. , vol.51 , pp. 5513-5522
    • Meyer, J.R.1    Kruer, M.R.2    Bartoli, F.J.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.