Electronic desorption of surface species using short-pulse lasers

Journal of Heat Transfer

Volumn 120, Issue 3, 1998, Pages 765-771

  Phinney, L M ^a,b   Tien, Chang Lin ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b University of Illinois at Urbana Champaign   (United States)

Author keywords

Analytical; Desorption; Heat transfer; Laser; Microscale

Indexed keywords

ELECTRONIC DESORPTION; SHORT-PULSE LASER HEATING;

DECONTAMINATION; DESORPTION; HEATING; IMPURITIES; LASER APPLICATIONS; MICROELECTROMECHANICAL DEVICES;

MICROELECTRONIC PROCESSING;

CLEANING; CORROSION; REMOVAL;

EID: 0007951110     PISSN: 00221481     EISSN: 15288943     Source Type: Journal    
DOI: 10.1115/1.2824348     Document Type: Article

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