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Volumn 9, Issue 9, 1998, Pages 749-754

Stacking technology for a space constrained microsystem

Author keywords

[No Author keywords available]

Indexed keywords

BONDING; ELECTRONICS PACKAGING; FLIP CHIP DEVICES; INTEGRATED CIRCUITS; MICROPROCESSOR CHIPS; SOLDERING; TRANSDUCERS;

EID: 0344641964     PISSN: 1045389X     EISSN: None     Source Type: Journal    
DOI: 10.1177/1045389X9800900907     Document Type: Article
Times cited : (7)

References (16)
  • 1
    • 0344096316 scopus 로고    scopus 로고
    • Flip chip technology for automotive micro sensors: Airbag accelerometer assembly and auto-sealed approach
    • Caillat, P. et al 1996. "Flip Chip Technology for Automotive Micro Sensors: Airbag Accelerometer Assembly and Auto-Sealed Approach," VLSI and Microsystem Packaging Techniques and Manufacturing Technologies, 67.
    • (1996) VLSI and Microsystem Packaging Techniques and Manufacturing Technologies , pp. 67
    • Caillat, P.1
  • 4
    • 85038065915 scopus 로고    scopus 로고
    • Epoxy Technologies Inc., 14 Fortune Drive, Billerica, MA 01821, USA
    • Epoxy Technologies Inc., 14 Fortune Drive, Billerica, MA 01821, USA.
  • 6
    • 0041940609 scopus 로고    scopus 로고
    • Conformal coating by photoresist of sharp corners of anisotropically etched through-holes in silicon
    • Heschel, M and S. Bouwstra. 1998. "Conformal Coating by Photoresist of Sharp Corners of Anisotropically Etched Through-Holes in Silicon," Sensors and Actuators A, 70(1-2):75-80.
    • (1998) Sensors and Actuators A , vol.70 , Issue.1-2 , pp. 75-80
    • Heschel, M.1    Bouwstra, S.2
  • 7
    • 0029390658 scopus 로고
    • Photolithography on micromachined 3D surfaces using electrodeposited photoresists
    • Kersten, P., S. Bouwstra, and J. W. Petersen. 1995. "Photolithography on Micromachined 3D Surfaces Using Electrodeposited Photoresists," Sensors and Actuators A, 51:51-54.
    • (1995) Sensors and Actuators A , vol.51 , pp. 51-54
    • Kersten, P.1    Bouwstra, S.2    Petersen, J.W.3
  • 9
    • 0030681517 scopus 로고    scopus 로고
    • Oxidation and reduction of eutectic SnPb, InSn and AuSn: A knowledge base for fluxless solder bonding applications
    • Kuhmann, J. F. et al. 1997a. "Oxidation and Reduction of Eutectic SnPb, InSn and AuSn: A Knowledge Base for Fluxless Solder Bonding Applications," Proc. 47th ECTC, 120-126.
    • (1997) Proc. 47th ECTC , pp. 120-126
    • Kuhmann, J.F.1
  • 11
    • 0031998061 scopus 로고    scopus 로고
    • Pt thin-film metallization for FC-bonding using SnPb(60/40) solder bump metallurgy
    • Kuhmann, J. F. et al. 1998. "Pt Thin-Film Metallization for FC-Bonding Using SnPb(60/40) Solder Bump Metallurgy," Materials Science and Engineering A, 242:22-25.
    • (1998) Materials Science and Engineering A , vol.242 , pp. 22-25
    • Kuhmann, J.F.1
  • 13
    • 0028125418 scopus 로고
    • Fabrication technology for wafer through-hole interconnections and three-dimensional stacks of chips and wafers
    • Linder, S. et al. 1994. "Fabrication Technology for Wafer Through-Hole Interconnections and Three-Dimensional Stacks of Chips and Wafers," Proc. MEMS '94, 349-354.
    • (1994) Proc. MEMS '94 , pp. 349-354
    • Linder, S.1
  • 14
    • 0029751903 scopus 로고    scopus 로고
    • Photolithography in anisotropically etched grooves
    • Linder, S. et al. 1996. "Photolithography in Anisotropically Etched Grooves," Proc. MEMS '96, 38-43.
    • (1996) Proc. MEMS '96 , pp. 38-43
    • Linder, S.1
  • 15
    • 84924343341 scopus 로고    scopus 로고
    • Namics Corporation, 3993 Nigorikawa, Niigata-City 950-31, Japan
    • Namics Corporation, 3993 Nigorikawa, Niigata-City 950-31, Japan.
  • 16
    • 0030647718 scopus 로고    scopus 로고
    • Fluxless no-clean assembly of optoelectronic devices with PADS
    • Nangalia, S. et al. 1997. "Fluxless No-Clean Assembly of Optoelectronic Devices with PADS," Proc. 47th ECTC, 755-762.
    • (1997) Proc. 47th ECTC , pp. 755-762
    • Nangalia, S.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.