Ferroelectric Pb(Zr 0.52Ti 0.48)/SiC field-effect transistor

Applied Physics Letters

Volumn 83, Issue 19, 2003, Pages 3975-3977

  Koo, Sang Mo ^a,b   Khartsev, Sergey ^a   Zetterling, Carl Mikael ^a   Grishin, Alex ^a   Ostling, Mikael ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPLETION MODE TRANSISTORS; DRAIN CURRENT; MEMORY EFFECTS;

ANNEALING; CURRENT VOLTAGE CHARACTERISTICS; DRY ETCHING; ELECTRON BEAMS; EVAPORATION; FERROELECTRIC MATERIALS; PHOTOLITHOGRAPHY; POLARIZATION; SILICON CARBIDE; SUBSTRATES;

FIELD EFFECT TRANSISTORS;

EID: 0344514648     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1625425     Document Type: Article

References (14)

1. S. Y. Wu, IEEE Trans. Electron Devices ED-21, 499 (1974).
2. T. Granzow, Th. Woike, M. Wöhlecke, M. Imlau, and W. Kleemann, Phys. Rev. Lett. 89, 127601 (2002).
3. A. R. Zomorrodian, H. Lin, N. J. Wu, T. Q. Huang, D. Liu, and A. Ignatiev, Appl. Phys. Lett. 69, 1789 (1996).
4. J. F. Scott, C. A. Araujo, H. Brett Meadows, L. D. McMillan, and A. Shawabkeh, J. Appl. Phys. 66, 1444 (1989).
5. S. C. Philpy, D. A. Kamp, A. D. DeVilbiss, A. F. Isacson, and G. F. Derbenwick, Proc. IEEE Aerospace Conf. 5, 377 (2000).
6. B. J. Baliga, J. Appl. Phys. 53, 1759 (1982).
7. B. J. Baliga, IEEE Electron Device Lett. 10, 455 (1989).
8. E. O. Johnson, RCA Rev. 26, 163 (1963).
9. R. W. Keyes, Proc. IEEE 60, 225 (1972).
10. K. Shenai, R. S. Scott, and B. J. Baliga, IEEE Trans. Electron Devices 36, 1811 (1989).
11. J. A. Cooper, M. R. Melloch, R. Singh, A. Agarwal, and J. W. Palmour, IEEE Trans. Electron Devices 49, 658 (2002).
12. S.-M. Koo, S. I. Khartsev, C.-M. Zetterling, A. M. Grishin, and M. Östling, Appl. Phys. Lett. 81, 895 (2002).
13. C. J. Scozzie, F. B. McLean, and J. M. McGarrity, J. Appl. Phys. 81, 7687 (1997).
14. C. H. Seager, D. C. McIntyre, W. L. Warren, and B. A. Tuttle, Appl. Phys. Lett. 68, 2660 (1996).