Theoretical and experimental studies of the atomic structure of oxygen-rich amorphous silicon oxynitride films

Physical Review B - Condensed Matter and Materials Physics

Volumn 68, Issue 15, 2003, Pages

  Scopel, L ^a   Da Silva, Antônio ^a   Orellana, W ^a   Prado, J ^a   Fantini, A ^a   Fazzio, A ^a   Pereyra, I ^a  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

NITROGEN DERIVATIVE; OXYGEN DERIVATIVE; SILICON DERIVATIVE;

ARTICLE; ATOMIC PARTICLE; CHEMICAL BOND; FILM; MONTE CARLO METHOD; STRUCTURE ANALYSIS; THEORY;

EID: 0344442434     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.68.155332     Document Type: Article

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