Nanotube devices fabricated in a nano laboratory

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 3, Issue , 2003, Pages 3624-3629

  Dong, Lixin ^a   Arai, Fumihito ^a   Nakajima, Masahiro ^a   Liu, Pou ^a   Fukuda, Toshio ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Carbon nanotubes; Electron beam induced deposition; Nano laboratory; Nanodevices; Nanorobotic manipulations

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON NANOTUBES; CATHODES; DEGREES OF FREEDOM (MECHANICS); ELECTRON BEAMS; ELECTRON SOURCES; PIEZOELECTRIC DEVICES; SCANNING ELECTRON MICROSCOPY; TUNGSTEN COMPOUNDS;

ELECTRON BEAM INDUCED DEPOSITION; FIELD EMISSION SCANNING ELECTRON MICROSCOPE; MASS FLOW SENSOR; NANOROBOTIC MANIPULATION; NANOTUBE COLD CATHODE; PIEZORESISTIVE LEVER;

MANIPULATORS;

EID: 0344153866     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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