Micromachined vibration sensor with on-chip circuitry and optical interconnects

Sensors and Actuators, A: Physical

Volumn 68, Issue 1-3, 1998, Pages 249-256

  Peiner, Erwin ^a   Fricke, Klaus ^a   Fehly, Detlef ^a   Schlachetzki, Andreas ^a   Hauptmann, Peter ^b  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b OTTO VON GUERICKE UNIVERSITY   (Germany)

Author keywords

Bulk micromachining; Fibre optical readout; MOS circuitry; Vibration sensors

Indexed keywords

MICROMACHINING; MOS DEVICES; OPTICAL INSTRUMENTS; OPTICAL INTERCONNECTS; READOUT SYSTEMS; RESONANCE;

FIBRE OPTICAL READOUT; ON CHIP CIRCUITRY; OPTOELECTRONIC CONVERSION; VIBRATION SENSOR;

SILICON SENSORS;

EID: 0042078584     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00013-2     Document Type: Article

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