Seed layer corrosion of Damascene structures in copper sulfate electrolytes

Materials Science in Semiconductor Processing

Volumn 6, Issue 4, 2003, Pages 225-233

  Martyak, Nicholas M ^a   Ricou, Pierre ^a  

^a ARKEMA INC   (United States)

Author keywords

Copper; Corrosion; Damascene; Seed layer

Indexed keywords

COPPER; CORROSION; DISSOLUTION; SOLUTIONS; TANTALUM COMPOUNDS;

DAMASCENE STRUCTURES;

ELECTROLYTES;

EID: 0242611472     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mssp.2003.09.002     Document Type: Article

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