Failure analysis of a cascade laser structure by electrostatic force microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 5, 2003, Pages 2151-2154

  Azize, M ^a   Girard, P ^a   Teissier, R ^b   Baranov, A N ^b   Joullie A ^b  

^a UNIV MONTPELLIER   (France)

^b UNIVERSITÉ MONTPELLIER II   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTROSTATICS; FAILURE ANALYSIS; LASER APPLICATIONS; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING INDIUM COMPOUNDS; SURFACE PROPERTIES;

CASCADE LASER STRUCTURE; ELECTROSTATIC FORCE MICROSCOPY; QUANTUM CASCADE LASER; SURFACE POTENTIAL DISTRIBUTION;

QUANTUM WELL LASERS;

EID: 0242593753     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1609478     Document Type: Article

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