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Surface and Coatings Technology

Volumn 176, Issue 1, 2003, Pages 115-123

Properties of interfaces in Cu/Ti1-xAlxN/〈Si〉 multilayers

(3) Lii, Ding Fwu a Huang, Jow Lay b Lin, Jenn Fuh b

a CHENG SHIU UNIVERSITY (Taiwan)

b NATIONAL CHENG KUNG UNIVERSITY (Taiwan)

Author keywords

Adhesion; Reactive magnetron sputtering; Residual stress; Surface roughness

Indexed keywords

ALUMINUM; MAGNETRON SPUTTERING; MICROSTRUCTURE; NITROGEN; RESIDUAL STRESSES; SURFACE ROUGHNESS; THIN FILMS; TITANIUM;

DIFFUSION BARRIER;

COPPER;

SURFACE ROUGHNESS;

EID: 0242583243 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(03)00335-9 Document Type: Article

Times cited : (5)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.