Fabrication of TiNi-based shape memory alloy thin films by simultaneous multi-target sputtering method

Journal De Physique. IV : JP

Volumn 112 II, Issue , 2003, Pages 869-872

  Yamamoto, T ^a   Miyazaki, S ^a  

^a UNIVERSITY OF TSUKUBA   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; COMPOSITION EFFECTS; DEPOSITION; FRACTURE; MAGNETRON SPUTTERING; QUENCHING; SCANNING ELECTRON MICROSCOPY; SHAPE MEMORY EFFECT; STRESSES; THERMAL EFFECTS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

FRACTURE STRESS; SHAPE MEMORY ALLOY THIN FILMS; SIMULTANEOUS MULTI-TARGET SPUTTERING;

TITANIUM ALLOYS;

EID: 0242581397     PISSN: 11554339     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1051/jp4:20031019     Document Type: Conference Paper

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