Anisotropy in microdevices produced by micromachining of cold-rolled NiTi sheets

Materials Science and Engineering: A

Volumn 270, Issue 2, 1999, Pages 145-150

  Kohl, M ^a   Allen, D M ^b   Chen, T T ^b   Miyazaki, S ^c   Schworer M ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b CRANFIELD UNIVERSITY   (United Kingdom)

^c UNIVERSITY OF TSUKUBA   (Japan)

Author keywords

Anisotropy; Martensitic transformation; Micromachining; Shape memory alloys; Texture

Indexed keywords

ANISOTROPY; COLD ROLLING; DIFFERENTIAL SCANNING CALORIMETRY; ELASTIC MODULI; ELECTRIC RESISTANCE MEASUREMENT; ETCHING; MARTENSITIC TRANSFORMATIONS; MICROACTUATORS; MICROMACHINING; PHOTOCHEMICAL REACTIONS; SHAPE MEMORY EFFECT; SHEET METAL;

BEAM BENDING CHARACTERISTIC; DOUBLE BEAM CANTILEVER; ELECTROLYTIC PHOTOETCHING; ROLLING INDUCED TEXTURE; THICKNESS DEPENDENT YOUNG MODULUS;

NICKEL ALLOYS;

EID: 0033189631     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5093(99)00168-9     Document Type: Article

References (6)

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2. [2] A.D. Johnson, E.J. Shahoian, Recent progress in thin film shape memory microactuators, Proceedings of MEMS 95, Amsterdam, the Netherlands, IEEE Catalog No. 95CH35754, 1995, p. 216.
3. [3] M. Kohl, K.D. Skrobanek, A. Schüßler, M. Teschner, S. Miyazaki, Stress-optimised integrated linear actuators with shape memory effect, in: H. Borgmann (Ed.), Proceedings of the ACTUATOR 96, Bremen, Germany, 1996, p. 366.
4. [4] K.D. Skrobanek, M. Kohl, S. Miyazaki, Stress-optimised shape memory microvalves, Proceedings of MEMS 97, Nagoya, Japan, IEEE Catalog No.97CH36021, 1997, p. 256.
5. [5] D.M. Allen, T. Leong, S.H. Lim, M. Kohl, Photofabrication of the third dimension of NiTi shape memory alloy microactuators, SPIE Proc. Ser. 3225 (1997) 126.
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