An efficient numerical algorithm for extracting pull-in hyper-surfaces of electrostatic actuators with multiple uncoupled electrodes

2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002

Volumn , Issue , 2002, Pages 206-209

  Elata, David ^a   Bochobza Degani, Ofir ^a   Nemirovsky, Yael ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

DIPIE; Electrostatic actuation; Multiple uncoupled voltage sources; Pull In Hypersurface

Indexed keywords

ALGORITHMS; DEFORMATION; DEGREES OF FREEDOM (MECHANICS); ELECTRIC POTENTIAL; ELECTRODES; MAPPING; MICROELECTROMECHANICAL DEVICES; PARAMETER ESTIMATION;

DIPIE; EQUILIBRIUM STATE; MULTIPLE UNCOUPLED VOLTAGE SOURCES; PULL-IN HYPERSURFACE;

ELECTROSTATIC ACTUATORS;

EID: 0242501061     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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