Triangle Transducer for Micro Electro Mechanical Systems (MEMS) simulation in ANSYS finite element program

2002 International Conference on Modeling and Simulation of Microsystems - MSM 2002

Volumn , Issue , 2002, Pages 380-383

  Gyimesi, Miklos ^a   Ostergaard, Dale ^a   Avdeev, Ilya ^b  

^a ANSYS INC   (United States)

^b UNIVERSITY OF PITTSBURGH   (United States)

Author keywords

(MEMS) Finite Elements; Micro Electro Mechanical Systems; Reduced Order Modeling; Transducer

Indexed keywords

ELECTRO-MECHANICAL SYSTEMS; ELECTROSTATIC MOTORS; FINITE ELEMENTS; REDUCED ORDER MODELING;

BOUNDARY ELEMENT METHOD; COMPUTATIONAL GEOMETRY; COMPUTER SIMULATION; ELECTRIC FIELDS; ELECTRIC MOTORS; FINITE ELEMENT METHOD; HARMONIC ANALYSIS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; OPTICAL SWITCHES;

TRANSDUCERS;

EID: 0242669483     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)

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