Simultaneous, multilayer plasma etching and deposition of fluorocarbon layers on silicon

Journal of Applied Physics

Volumn 94, Issue 8, 2003, Pages 4776-4780

  Abraham Shrauner, Barbara ^a  

^a WASHINGTON UNIVERSITY IN ST LOUIS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ION BOMBARDMENT; MATHEMATICAL MODELS; MULTILAYERS; PLASMA ETCHING; SILICON;

ION ENERGY;

FLUOROCARBONS;

EID: 0242367278     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1606857     Document Type: Article

References (17)

1. T. E. F. M. Standaert, M. Schaepkens, N. R. Rueger, P. G. M. Sebel, G. S. Oehrlein, and J. A. Cook, J. Vac. Sci. Technol. A16, 239 (1998).
2. D. C. Gray, I. Tepermeister, and H. H. Sawin, J. Vac. Sci. Technol. B 11, 1243 (1993).
3. G. S. Oehrlein, Y. Zhang, D. Vender, and M. Haverlag, J. Vac. Sci. Technol. A 12, 323 (1994).
4. S.-B. Wang and A. E. Wendt, J. Vac. Sci. Technol. A 19, 2425 (2001).
5. G. S. Oehrlein, R. M. Tromp, J. C. Tsang, Y. H. Lee, and E. J. Petrillo, J. Electrochem. Soc. 132, 1441 (1985).
6. N. R. Rueger, J. J. Heulens, M. Schaepkens, M. F. Doemling, J. M. Mirza, T. E. F. M. Standaert, and G. S. Oehrlein, J. Vac. Sci. Technol. A15, 1881 (1997).
7. J. Ding and N. Hershkowitz, Appl. Phys. Lett. 68, 1619 (1996).
8. C. Steinbüchel, Appl. Phys. Lett. 55, 1960 (1989).
9. I. Bello, W. H. Chang, and W. M. Lau, J. Vac. Sci. Technol. A 12, 1425 (1994).
10. N. Lucas, H. Zabel, and H. Morkoç, J. Appl. Phys. 82, 227 (1997).
11. C. A. Gough, S. E. DeBolt, and P. A. Kollman, J. Comput. Chem. 13, 963 (1992).
12. N. C. Baird, Can. J. Chem. 61, 1567 (1983).
13. S. Tachi, K. Tsujimoto, S. Arai, and T. Kure, J. Vac. Sci. Technol. A 9, 796 (1991).
14. E. Gogolides, P. Vauvert, G. Kokkoris, G. Turban, and A. G. Boudovis, J. Appl. Phys. 88, 5570 (2000).
15. W. Jacob, Thin Solid Films 326, 1 (1998).
16. M. J. Sowa, M. E. Littau, V. Pohray, and J. L. Cecchi, J. Vac. Sci. Technol. A 18, 2122 (2000).
17. F. F. Chen, Introduction to Plasma Physics and Controlled Fusion, 2nd ed. (Plenum, New York, 1984), pp. 156, 157.