Synthesis of InN by N+ implantation on InP at high temperature

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 212, Issue 1-4, 2003, Pages 521-524

  Santhakumar, K ^a,b   Kesavamoorthy, R ^b   Nair, K G M ^b   Jayavel, P ^c   Kanjilal, D ^d   Sankara Sastry, V ^b   Ravichandran, V ^a  

^a UNIVERSITY OF MADRAS   (India)

^b INDIRA GANDHI CENTRE FOR ATOMIC RESEARCH   (India)

^c KOBE UNIVERSITY   (Japan)

^d INTER UNIVERSITY ACCELERATOR CENTRE   (India)

Author keywords

GIXRD; High temperature implantation; InP; Nitrogen; Raman scattering

Indexed keywords

HIGH TEMPERATURE EFFECTS; ION IMPLANTATION; NITROGEN; RAMAN SCATTERING; RAMAN SPECTROSCOPY; SINGLE CRYSTALS; SYNTHESIS (CHEMICAL); X RAY DIFFRACTION ANALYSIS;

NITRADATION;

SEMICONDUCTING INDIUM COMPOUNDS;

EID: 0242337648     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)01506-4     Document Type: Conference Paper

References (20)

1. Nakamura S. Solid State Commun. 102:1997;237.
2. Chen W.-K., Pan Y.-C., Lin H.-C., Ou J. Jpn. J. Appl. Phys. 36:1997;L1625.
3. MacChesney J.B., Bridenbaugh P.M., O'Connor P.B. Mater. Res. Bull. 5:1970;783.
4. Jones R.D., Rose K. J. Phys. Chem. Solids. 48:1987;587.
5. Jones M.E., Enstrom J.R. Appl. Phys. Lett. 67:1995;542.
6. Zhu X.Y., Wolf M., Huett T., White J.M. J. Chem. Phys. 97:1992;5856.
7. Makimoto T., Kobayashi N. Appl. Phys. Lett. 70:1997;1161.
8. Iwata K., Asahi H., Asami K., Gonda S. J. Cryst. Growth. 175-176:1997;150.
9. Starnberg H.I., Soukisassian P., Kendelewicz T. Surf. Sci. 267-270:1992;915.
10. Soukisassian P., Stamberg H.I., Kendelewicz T. Surf. Sci. 56-58:1992;772.
11. White A., Short K.T., Dynes R.C., Hull R., Vandenberg S.M. Nucl. Instr. and Meth. B. 39:1989;253.
12. Pan J.P., Wee A.T.S., Huan C.H.A., Tan H.S., Tan K.L. J. Phys. D: Appl. Phys. 29:1996;2997.
13. Suzuki Y., Kumano H., Tomota W., Sanada N., Fukuda Y. Appl. Surf. Sci. 162-163:2000;172.
14. Rao C.S.R., Sundaram S., Schmidt R.L., Comas J. J. Appl. Phys. 54:1983;1808.
15. Jimenez J., Martin E., Prieto A.C. Mater. Lett. 12:1991;132.
16. Biersack J.P., Ziegler J.F. The Stopping and Ranges of Ions in Matter. Vol. 1:1985;Pergamon, New York.
17. Davydov V.Yu., Emtsev V.V., Goncharuk I.N., Smirnov A.N., Petrikov V.D., Smirnov M.B., Inushima T. Appl. Phys. Lett. 75:1999;3297.
18. Kwon H.J., Lee Y.H., Miki O., Yamano H., Yoshida A. Appl. Phys. Lett. 69:1996;937.
19. Lee M.C., Lin H.C., Pan Y.C., Shu C.K., Ou J., Chen W.H., Chen W.K. Appl. Phys. Lett. 73:1998;2606.
20. Inushima T., Shiraishi T., Davydov V.Yu. Solid State Commun. 110:1999;491.