Nitridation of an InP(001) surface by nitrogen ion beams

Applied Surface Science

Volumn 162, Issue , 2000, Pages 172-177

  Suzuki, Y ^a   Kumano, H ^a   Tomota, W ^a   Sanada, N ^a   Fukuda, Y ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; CHEMICAL BONDS; CRYSTAL ATOMIC STRUCTURE; CRYSTAL ORIENTATION; ION BEAMS; ION BOMBARDMENT; MORPHOLOGY; NITRIDING; NITROGEN; SURFACE CHEMISTRY; X RAY PHOTOELECTRON SPECTROSCOPY;

GAUSSIAN DISTRIBUTION;

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 0034249961     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(00)00188-4     Document Type: Article

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