Tetrakis(diethylamido) titanium (TDEAT) interactions with SiO 2 and Cu substrates

Applied Surface Science

Volumn 220, Issue 1-4, 2003, Pages 203-216

  Tong, J ^a   Magtoto, N ^a   Kelber, J ^a  

^a UNIVERSITY OF NORTH TEXAS   (United States)

Author keywords

Cu; SiO 2; TDEAT; XPS

Indexed keywords

CHEMICAL BONDS; METALLIC FILMS; SILICA; TITANIUM COMPOUNDS; ULTRAHIGH VACUUM; X RAY PHOTOELECTRON SPECTROSCOPY;

PRECURSOR REACTIONS;

SURFACE CHEMISTRY;

EID: 0142248254     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00874-2     Document Type: Article

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