SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 4 II, 2000, Pages 1590-1594

Low-temperature growth of Ti(C,N) thin films on D2 steel and Si(100) substrates by plasma-enhanced metalorganic chemical vapor deposition

(4) Boo, Jin Hyo a Heo, Cheol Ho a Cho, Yong Ki a Han, Jeon Geon a

a Sungkyunkwan University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; IONIZATION OF SOLIDS; LOW TEMPERATURE PHENOMENA; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; STEEL; THIN FILMS; TITANIUM CARBIDE; TITANIUM NITRIDE;

TETRAKIS DIETHYLAMIDOTITANIUM; TITANIUM ISOPROPOXIDE;

CERAMIC COATINGS;

EID: 0034230218 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.582390 Document Type: Article

Times cited : (5)

References (14)

1
- 0030381667
- M. H. Staia, E. S. Puchi, D. B. Lewis, J. Cawley, and D. Morel, Surf. Coat. Technol. 86-87, 432 (1996).
- (1996) Surf. Coat. Technol. , vol.86-87 , pp. 432
- Staia, M.H.¹ Puchi, E.S.² Lewis, D.B.³ Cawley, J.⁴ Morel, D.⁵

2
- 0003602826
- Academic, San Diego
- M. Ohring, The Materials Science of Thin Films (Academic, San Diego, 1992), p. 547.
- (1992) The Materials Science of Thin Films , pp. 547
- Ohring, M.¹

3
- 0025444879
- A. Sherman, J. Electrochem. Soc. 137, 1892 (1990).
- (1990) J. Electrochem. Soc. , vol.137 , pp. 1892
- Sherman, A.¹

4
- 0026917213
- M. J. Buiting and A. F. Otterloo, J. Electrochem. Soc. 139, 2580 (1992).
- (1992) J. Electrochem. Soc. , vol.139 , pp. 2580
- Buiting, M.J.¹ Otterloo, A.F.²

5
- 0030564557
- S. W. Kim, H. Jimba, A. Sekiquchi, O. Okada, and N. Hosokawa, Appl. Surf. Sci. 100-101, 546 (1996).
- (1996) Appl. Surf. Sci. , vol.100-101 , pp. 546
- Kim, S.W.¹ Jimba, H.² Sekiquchi, A.³ Okada, O.⁴ Hosokawa, N.⁵

6
- 15844400650
- B. H. Weiller, J. Am. Chem. Soc. 118, 4975 (1996).
- (1996) J. Am. Chem. Soc. , vol.118 , pp. 4975
- Weiller, B.H.¹

7
- 0024051440
- F. H. M. Sanders and G. Verspui, Thin Solid Films 161, L87 (1988).
- (1988) Thin Solid Films , vol.161
- Sanders, F.H.M.¹ Verspui, G.²

8
- 0024105962
- T. Arai, H. Fujita, and K. Oguri, Thin Solid Films 165, 139 (1988).
- (1988) Thin Solid Films , vol.165 , pp. 139
- Arai, T.¹ Fujita, H.² Oguri, K.³

9
- 0000182220
- M. R. Hilton, L. R. Narasimhan, S. Nakamura, M. Salmeron, and G. A. Somorjai, Thin Solid Films 139, 247 (1986).
- (1986) Thin Solid Films , vol.139 , pp. 247
- Hilton, M.R.¹ Narasimhan, L.R.² Nakamura, S.³ Salmeron, M.⁴ Somorjai, G.A.⁵

10
- 0025887934
- K. Oguri, H. Fujita, and T. Arai, Thin Solid Films 195, 77 (1991).
- (1991) Thin Solid Films , vol.195 , pp. 77
- Oguri, K.¹ Fujita, H.² Arai, T.³

11
- 0026189380
- K.-T. Rie, A. Gebaüer, and J. Wöhle, Mater. Sci. Eng., A 139, 37 (1991).
- (1991) Mater. Sci. Eng., A , vol.139 , pp. 37
- Rie, K.-T.¹ Gebaüer, A.² Wöhle, J.³

12
- 0007078656
- K.-T. Rie, A. Gebaüer, and J. Wöhle, Surf. Coat. Technol. 60, 37 (1993).
- (1993) Surf. Coat. Technol. , vol.60 , pp. 37
- Rie, K.-T.¹ Gebaüer, A.² Wöhle, J.³

13
- 0003840268
- Academic, New York
- I. P. Herman, Optical Diagnostics for Thin Film Deposition (Academic, New York, 1996).
- (1996) Optical Diagnostics for Thin Film Deposition
- Herman, I.P.¹

14
- 0001454009
- K.-T. Rie, J. Wöhle, and A. Gebaüer, Surf. Coat. Technol. 98, 1534 (1998).
- (1998) Surf. Coat. Technol. , vol.98 , pp. 1534
- Rie, K.-T.¹ Wöhle, J.² Gebaüer, A.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.