Microcrystalline Si:H solar cells fabricated using ECR plasma deposition

IEE Proceedings: Circuits, Devices and Systems

Volumn 150, Issue 4, 2003, Pages 316-321

  Dalal, V L ^a   Zhu, J H ^a   Welsh, M ^a   Noack, M ^a  

^a Iowa State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS ALLOYS; CRYSTALLINE MATERIALS; ELECTRON CYCLOTRON RESONANCE; MIXTURES; PLASMAS; SILANES; STAINLESS STEEL; SURFACE CHEMISTRY;

PLASMA DEPOSITION;

SOLAR CELLS;

EID: 0142198866     PISSN: 13502409     EISSN: None     Source Type: Journal    
DOI: 10.1049/ip-cds:20030629     Document Type: Conference Paper

References (23)

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