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Volumn 13, Issue 13, 2001, Pages 2875-2881
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Preparation of TiO2-anatase film on Si(001) substrate with TiN and SrTiO3 as buffer layers
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Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTAL MICROSTRUCTURE;
EPITAXIAL GROWTH;
PULSED LASER DEPOSITION;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SILICON;
STRONTIUM COMPOUNDS;
THIN FILMS;
TITANIUM DIOXIDE;
TITANIUM NITRIDE;
X RAY CRYSTALLOGRAPHY;
ROCKING CURVE ANALYSIS;
STRONTIUM TITANATE;
OPTICAL FILMS;
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EID: 0035794692
PISSN: 09538984
EISSN: None
Source Type: Journal
DOI: 10.1088/0953-8984/13/13/302 Document Type: Article |
Times cited : (15)
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References (17)
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