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Volumn 108, Issue 9, 2000, Pages 807-812

Laser drilling technique for multilayer ceramic chip component and module

Author keywords

Ceramic multilayer modules; Machining; Multilayer chip inductors; YAG laser

Indexed keywords

DRILLING; LASER ABLATION; LASER PULSES; MICROPROCESSOR CHIPS; MULTICHIP MODULES; MULTILAYERS;

EID: 0034275678     PISSN: 09145400     EISSN: None     Source Type: Journal    
DOI: 10.2109/jcersj.108.1261_807     Document Type: Article
Times cited : (6)

References (10)
  • 2
    • 0009616714 scopus 로고
    • Ed. by R. C. Crafer and P. J. Oakley, Chapman & Hall, London
    • N. J. Adams, "Laser Processing in Manufacturing," Ed. by R. C. Crafer and P. J. Oakley, Chapman & Hall, London (1993) p. 115.
    • (1993) Laser Processing in Manufacturing , pp. 115
    • Adams, N.J.1
  • 3
    • 0009571139 scopus 로고
    • Ed. by R. C. Crafer and P. J. Oakley, Chapman & Hall, London
    • T. M. W. Weedon, "Laser Processing in Manufacturing," Ed. by R. C. Crafer and P. J. Oakley, Chapman & Hall, London (1993) p. 68.
    • (1993) Laser Processing in Manufacturing , pp. 68
    • Weedon, T.M.W.1
  • 4
    • 1642603176 scopus 로고    scopus 로고
    • Development of ALIVH for fine pitch pattern
    • Aoyama-Gakuin Univ., Tokyo, Japan, March 19
    • T. Nishiyama, T. Ando and K. Fukuoka, Development of ALIVH for Fine Pitch Pattern, Proc. 13 th JIEP Ann. Meeting (Aoyama-Gakuin Univ., Tokyo, Japan), March 19, 1999.
    • (1999) Proc. 13 Th JIEP Ann. Meeting
    • Nishiyama, T.1    Ando, T.2    Fukuoka, K.3
  • 5
    • 1642603180 scopus 로고
    • Tokyo, Japan, Society for Hybrid Microelectronics, Tokyo, Japan
    • M. Takaya, A. Fujisawa and Y. Mochizuki, Proc. ISHM '90 (Tokyo, Japan, 1990), Society for Hybrid Microelectronics, Tokyo, Japan, pp. 747-51.
    • (1990) Proc. ISHM '90 , pp. 747-751
    • Takaya, M.1    Fujisawa, A.2    Mochizuki, Y.3
  • 6
    • 0040167601 scopus 로고
    • [in Japanese]
    • T. Nomura and M. Takaya, Hybrids, 3, 15-19 (1987) [in Japanese].
    • (1987) Hybrids , vol.3 , pp. 15-19
    • Nomura, T.1    Takaya, M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.