Local microscopic observation of passive integrated circuits by focused ion beam system

Journal of the Ceramic Society of Japan

Volumn 110, Issue 1281, 2002, Pages 440-443

  Nishi, Yuji ^a   Matsushita, Yuji ^a   Iwazaki, Yoshiki ^a   Fujimoto, Masayuki ^a  

^a TAIYO YUDEN CO LTD   (Japan)

Author keywords

FIB; Integration; Microstructure; TEM; Thin film capacitor

Indexed keywords

CAPACITORS; ION BEAMS; MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR DEVICES; SUBSTRATES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

FOCUSED ION BEAMS (FIB);

INTEGRATED CIRCUITS;

EID: 0036565635     PISSN: 09145400     EISSN: None     Source Type: Journal    
DOI: 10.2109/jcersj.110.440     Document Type: Article

References (12)