Synthesis of novel fluorinated norbornene derivatives for 157 nm application

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5039 I, Issue , 2003, Pages 589-599

  Koh, Meiten ^a   Ishikawa, Takuji ^a   Toriumi, Minoru ^a   Araki, Takayuki ^a   Yamashita, Tsuneo ^a   Aoyama, Hirokazu ^a   Yamazaki, Tamio ^b   Furukawa, Takamitsu ^b   Itani, Toshiro ^b  

^a DAIKIN INDUSTRIES LTD   (Japan)

^b SEMICONDUCTOR LEADING EDGE TECHNOLOGIES INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; COPOLYMERIZATION; FLUORINE; FLUORINE COMPOUNDS; FLUORINE CONTAINING POLYMERS; MATHEMATICAL MODELS; MONOMERS; PHOTORESISTS; SOLUBILITY; SYNTHESIS (CHEMICAL); TRANSPARENCY;

FLUORINATED NORBORNENE DERIVATIVES; HYDROXYFLUOROALKYL GROUPS; NORBORNENE DERIVATIVES; TETRAFLUOROETHYLENE;

PHOTOLITHOGRAPHY;

EID: 0141834703     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.485077     Document Type: Conference Paper

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