Performance improvement of CGHs for optical testing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5144, Issue , 2003, Pages 460-471

  Pruss, Christof ^a   Reichelt, Stephan ^a   Korolkov, Victor ^b   Osten, Wolfgang ^a   Tiziani, Hans J ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

^b INSTITUTE OF AUTOMATION AND ELECTROMETRY   (Russian Federation)

Author keywords

Circular laser writing system; Computer generated holograms; Continuous phase holograms; Laser direct writing

Indexed keywords

ALGORITHMS; COMPUTER APPLICATIONS; DIFFRACTIVE OPTICS; ELECTRON DEVICE MANUFACTURE; LASERS; OPTICAL DESIGN; OPTICAL MATERIALS; OPTICAL TESTING; PHOTORESISTS;

CIRCULAR LASER WRITING SYSTEM; COMPUTER GENERATED HOLOGRAMS; CONTINUOUS PHASE HOLOGRAMS; DIFFRACTIVE OPTICAL ELEMENTS; DIFFRACTIVE OPTICS FABRICATION; LASER DIRECT WRITING;

HOLOGRAMS;

EID: 0141831825     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.500415     Document Type: Conference Paper

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