Polar coordinate laser pattern generator for fabrication of diffractive optical elements with arbitrary structure

Applied Optics

Volumn 38, Issue 8, 1999, Pages 1295-1301

  G Poleshchuk, Alexander ^a   G Churin, Evgeny ^a   P Koronkevich, Voldemar ^a   P Korolkov, Victor ^a   A Kharissov, Andrei ^a   V Cherkashin, Vadim ^a   P Kiryanov, Valerii ^b   V Kiryanov, Aleksei ^b   A Kokarev, Sergei ^b   G Verhoglyad, Alexander ^b  

^a INSTITUTE OF AUTOMATION AND ELECTROMETRY   (Russian Federation)

^b ENERGY SYSTEMS INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001570819     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.38.001295     Document Type: Article

References (25)

1. M. T. Gale, M. Rossi, J. Pedersen, and H. Schutz, “Fabrication of continuous-relief microoptical elements by direct laser writing in photoresist,” Opt. Eng. 33, 3556-3566 (1994).
2. U. Krackhardt, J. Schwider, M. Schrader, and N. Streibl, “Synthetic holograms written by a laser pattern generator,” Opt. Eng. 32, 781-785 (1993).
3. G. A. Lenkova and E. G. Churin, “High-resolution microobjective lens with kinoform corrector,” Opt. Appl. 21, 213-219 (1991).
4. J. Turunen, A. Vasara, and A. Friberg, “Holographic generation of diffractive-free beams,” Appl. Opt. 27, 3959-3963 (1988).
5. G. Neugebauer, R. Hauck, and O. Bryngdahl, “Computergenerated holograms: carrier of polar geometry,” Appl. Opt. 24, 777-784 (1985).
6. J. H. Burge, “Applications of computer-generated holograms for interferometric measurement of large aspheric optics,” in International Conference on Optical Fabrication and Testing, T. Kasai, ed., Proc. Soc. Photo-Opt. Instrum. Eng. 2576, 258-269 (1995).
7. M. B. Stern, “Binary optics—a VLSI-based microoptics technology,” Microelectron. Eng. 32, 369-388 (1996).
8. M. Haruna, M. Takahashi, K. Wakahayashi, and H. Nishi-hara, “Laser beam lithographed micro-Fresnel lenses,” Appl. Opt. 29, 5120-5126 (1990).
9. W. Goltsos and S. Liu, “Polar coordinate laser writer for binary optics fabrication,” in Computer and Optically Formed Holographic Optics, I. Cindrich and S. H. Lee, eds., Proc. Soc. Photo-Opt. Instrum. Eng. 1211, 137-147 (1990).
10. T. Nomura, K. Kamiya, H. Miyashiro, K. Yoshikawa, H. Tashiro, M. Suzuki, S. Ozono, F. Kobayashi, and M. Usuki, “An instrument for manufacturing zone-plates by using a lathe,” Precis. Eng. 16, 290-295 (1994).
11. J. P. Bowen, R. L. Michaels, and C. G. Blough, “Generation of large-diameter diffractive elements with laser pattern generation,” Appl. Opt. 36, 8970-8975 (1997).
12. S. Ogata, M. Tada, and M. Yoneda, “Electron-beam writing system and its application to large and high-density diffractive optic elements,” Appl. Opt. 33, 2032-2038 (1994).
13. V. M. Vedernikov, V. N. Vyukhin, V. P. Koronkevich, F. I. Kokoulin, A. I. Lokhmatov, V. I. Nalivaiko, A. G. Poleshchuk, G. G. Tarasov, V. A. Khanov, A. M. Sherbachenko, and Yu. I. Yurlov, “A precision photoconstructor for synthesizing optical components,” Autometriya 3, 3-17 (1981) (in Russian).
14. V. P. Koronkevich, V. P. Kirianov, F. I. Kokoulin, I. G. Palchikova, A. G. Poleshchuk, A. G. Sedukhin, E. G. Churin, Yu. I. Yurlov, A. M. Sherbachenko, “Fabrication of kinoform optical elements,” Optik 67, 259-266 (1984).
15. V. P. Koronkevich, V. P. Kiryanov, V. P. Korol’kov, A. G. Poleshchuk, V. V. Cherkashin, E. G. Churin, and A. A. Kharissov, “Fabrication of diffractive optical elements by direct laser writing with circular scanning,” in 5th International Workshop on Digital Image Processing and Computer Graphics (DIP-94), N. A. Kuznetsov and V. A. Soifer, eds., Proc. Soc. Photo-Opt. Instrum. Eng. 2363, 290-297 (1995).
16. V. V. Cherkashin, E. G. Churin, V. P. Koronkevich, V. P. Kiryanov, V. P. Korolkov, A. G. Poleshchuk, A. A. Kharissov, A. V. Kiryanov, S. A. Kokarev, and A. G. Verhoglad, “Circular laser writing system—CLWS-300C,” in Technical Digest of Diffractive Optics 1997, J. Turunen and F. Wyrowski, eds., Vol. 12 of EOS Topical Meeting Digest Series (European Optical Society, Savonlinna, Finland, 1997), pp. 222-223.
17. A. G. Sedukhin, “Analysis of the errors in fabrication circular sacles by a scanning method,” Sov. J. Opt. Technol. 53, 606 -609 (1986).
18. A. G. Poleshchuk, V. P. Koronkevich, V. P. Korolkov, A. A. Kharissov, and V. V. Cherkashin, “Fabrication of diffractive optical elements in the polar coordinate system: fabrication errors and their measurement,” Autometrya 6, 40-53 (1997) (in Russian).
19. V. P. Korolkov and A. G. Poleshchuk, “Control of optical radiation in precision laser photoplotters,” Autometrya 6, 51-61 (1985) (in Russian).
20. V. V. Cherkashin, E. G. Churin, V. P. Korolkov, V. P. Kooronkevich, A. A. Kharissov, A. G. Poleshchuk, and J. H. Burge, “Processing parameters optimisation for thermochemical writing of DOEs on chromium films,” in Diffractive and Holographic Device Technologies and Applications IV, I. Cin-drich and S. H. Lee, eds., Proc. Soc. Photo-Opt. Instrum. Eng. 3010, 168-179 (1997).
21. V. P. Koronkevich, A. G. Poleshchuk, E. G. Churin, and Yu. Yurlov, “Selective etching of laser exposure thin chromium films,” Pis’ma Zh. Teknich. Fiz. 11, 144-148 (1985) (in Russian).
22. V. Z. Gotchiyaev, V. P. Korolkov, A. P. Sokolov, and V. P. Chernukhin, “High resolution optical recording on a-Si films,” J. Non-Cryst. Solids 137/138, 1297-1300 (1991).
23. M. B. Fleming and M. C. Hutley, “Blazed diffractive optics,” Appl. Opt. 36, 4635-4643 (1997).
24. V. Yu. Bazhenov, M. S. Soskin, and M. V. Vasnetsov, “Screw dislocations in light wavefronts,” J. Mod. Opt. 39, 985-990 (1992).
25. A. G. Sedukhin and E. G. Churin, “Shape conversion of an inclined incident laser gaussian beam,” Autometrya 6, 75-81 (1995) (in Russian).