Polar coordinate laser writing systems: Error analysis of fabricated DOEs

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4440, Issue , 2001, Pages 161-172

  Poleshchuk, Alexander ^a   Korolkov, Victor ^a   Cherkashin, Vadim ^a   Reichelt, Stephan ^b   Burge, Jim ^c  

^a INSTITUTE OF AUTOMATION AND ELECTROMETRY   (Russian Federation)

^b UNIVERSITY OF STUTTGART   (Germany)

^c UNIVERSITY OF ARIZONA   (United States)

Author keywords

CGH; Computer generated holograms; Diffractive optical elements; DOE; Fabrication errors; Fabrication tolerances; Polar coordinate writer

Indexed keywords

ABERRATIONS; COMPUTER GENERATED HOLOGRAPHY; ERROR ANALYSIS; HOLOGRAPHIC INTERFEROMETRY; HOLOGRAPHIC OPTICAL ELEMENTS; IMAGE ANALYSIS; LASER OPTICS; OPTICAL DESIGN; OPTICAL TESTING; WAVEFRONTS;

DIFFRACTIVE OPTICAL ELEMENTS (DOE); LASER WRITING SYSTEMS;

DIFFRACTIVE OPTICS;

EID: 0035759660     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.448037     Document Type: Article

References (24)

1. J. Turunen, A. Vasara, A. Friberg, "Holographic generation of diffractive-free-beams," Appl. Optics 27, pp. 3959-3963 (1988).
2. G. Neugebauer, R. Hauck, O. Bryngdahl, "Computer-generated holograms: carder of polar geometry," Appl. Optics 24, pp. 777-784 (1985).
3. J. H. Burge, "Applications of computer-generated holograms for interferometric measurement of large aspheric optics," in International Conference on Optical Fabrication and Testing, T. Kasai, SPIE 2576, pp. 258-269 (1995).
4. J. Schwider, R. Burov. "Testing of aspherics by means of rotational-symmetric synthetic holograms," Optica Applicata, VI, 3, pp.83-88 (1976).
5. V. M. Vedernikov, V. N. Vyukhin, V. P. Koronkevich, F. I. Kokoulin, A. I. Lokhmatov, V. I. Nalivaiko, A. G. Poleshchuk, G. G. Tarasov, V. A. Khanov, A. M. Sherbachenko, and Yu. I. Yurlov, "A precision photoconstructor for synthesizing optical components," Avtometriya, N3, pp.3-17 (1981), (in Russian, Engl. Transl.: Optoelectronics, Instr. and Data Processing).
6. M. Haruna, M. Takahashi, K. Wakahayashi, and H. Nishihara, "Laser beam lithographed micro-Fresnel lenses," Appl. Optics, 29, pp.5120-5126 (1990).
7. W. Goltsos and S. Liu, "Polar Coordinate laser writer for binary optics fabrication," in Computer and Optically Formed Holographic Optics, I. Cindrich and S. H. Lee, eds., SPIE 1211, pp.137-147 (1990).
8. T. Nomura, K. Kamiya, H. Miyashiro, K. Yoshikawa, H. Tashiro, M. Suzuki, S. Ozono, F. Kobayashi, and M. Usuki, "An instrument for manufacturing zone-plates by using a lathe," Precision Eng. 16, No. 4, pp.290-295 (1994).
9. J. P. Bowen, R. L. Michaels, C. G. Blough, "Generation of large-diameter diffractive elements with laser pattern generation," Appl. Optics 36, pp. 8970-8975 (1997).
10. S. Ogata, M. Tada, and M. Yoneda, "Electron-beam writing system and its application to large and high-density diffractive optic elements," Appl. Optics 33, pp. 2032-2038 (1994).
11. A. G. Poleshchuk, E. G. Churin, V. P. Koronkevich, V. P. Korolkov, etc. "Polar coordinate laser pattern generator for fabrication of diffractive optical elements with arbitrary structure, ≫ Appl. Opt., 38, pp. 1295-1301 (1999).
12. J. H. Burge. "Measurement of large convex aspheres," Optical telescopes of Today and Tomorrow., SPIE 2871, pp.362-373, (1996).
13. S. M. Arnold, R. Kestner. "Verification and certification of CGH aspheric nulls," in Optical Manufacturing and Testing, ed. By Victor J. Doherty; H. Philip Stahl, Proc. SPIE 2536, pp.117-126, (1995).
14. A. G. Poleshchuk, V. P. Koronkevich, V. P. Korolkov, A. A. Kharissov, V. V. Cherkashin, "Fabrication of diffractive optical elements in the polar coordinate system: fabrication errors and their measurement," Avtometriya, N6, pp. 40-53 (1997), (in Russian, Engl. Transl.: Optoelectronics, Instr. and Data Processing).
15. J. Burge, SPIE 3782. Yu-Chun Chang and James Burge. "Error analysis for CGH optical testing," Optical Manufacturing and Testing III, H. P. Stahl, Editor, Proc. SPIE 3782, pp. 358-366 (1999).
16. J. Guhr. "Test results of the laser writing system CLWS-300c," Diffractive Optics' 97, Savolina, Finland. EOS Topical Meeting Digest Series: 12, pp.206-207 (1997).
17. P. Piero, S. Sinezi, M. Ripetto, G. V. Usplenev. "Using the circular laser writing system for fabrication of DOE gray-scale masks on the base of LDW glass plates," Computer Optics, 17, pp.85-93 (1997), Moscow-Samara (in Russian).
18. R. Freimann. "Aberrations of axially symmetric diffractive elements in relation to their fabrication inaccuracies," Optik, 111, No. 11, pp. 485-492 (2000).
19. V. P. Korolkov, R. Shimansky, A. G. Poleshchuk, V. V. Cherkashin, A. A. Kharissov, D. Denk, "Requirements and approaches to adapting laser writers for fabrication of gray-scale masks," in Lithographic and micromachining Techniques for Optical Component Fabrication, SPIE 4440, 2001.
20. V. P. Kirianov, S. A. Kokarev, "Laser-Interferometric driver of displacement with submanometer resolution," Avtometriya, N 2, pp. 3-7 (1998).
21. V. P. Koronkevich, A. G. Poleshchuk, E. G. Churin, and Yu. Yurlov, "Selective etching of laser exposure thin chromium films," Letters to Journal of Technical Physics 11, pp. 144-148 (1985).
22. V. V. Cherkashin, E. G. Churin, V. P. Korolkov, V. P. Kooronkevich, A. A. Kharissov, A. G. Poleshchuk, J. H. Burge, "Processing parameters optimisation for thermochemical writing of DOEs on chromium films," in Diffractive and Holographic Device Technologies and Applications IV, I. Cindrich and S. H. Lee, eds., SPIE. 3010, pp. 168-179 (1997).
23. T. D. Milster, C. L. Vernold. "Technique for aligning optical and mechanical axes on a rotating linear grating," Optical Engineering, 34, No. 10, pp. 2840-2845 (1995).
24. th Annual BACUS Symposiom on Photomask Technology and Management, SPIE 2621, pp 319-328 (1995).