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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3348, Issue , 1997, Pages 58-68

Accuracy potential of circular laser writing of DOEs

(5) Cherkashin, V V a Kharissov, A A a Korol'kov, V P a Koronkevich, V P a Poleshchuk, A G a

a INSTITUTE OF AUTOMATION AND ELECTROMETRY (Russian Federation)

Author keywords

Computer generated holograms; Diffractive optics; Laser beam lithography; Laser writing; Manufacturing of zone plates; Optical testing

Indexed keywords

BRAGG CELLS; CHROMIUM; DIFFRACTION GRATINGS; ELECTRON BEAM LITHOGRAPHY; ERROR ANALYSIS; HOLOGRAMS; LASER BEAMS; OPTICAL FILMS; OPTICAL SYSTEMS; OPTICAL TESTING; PHOTORESISTS; SCANNING;

CIRCULAR LASER WRITING SYSTEM; COMPUTER GENERATED HOLOGRAMS; DIFFRACTIVE OPTICAL ELEMENTS; ERROR MEASUREMENT; LASER BEAM LITHOGRAPHY; ZONE PLATES;

DIFFRACTIVE OPTICS;

EID: 0031394211 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.302509 Document Type: Conference Paper

Times cited : (15)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.