Evaluation of rotational symmetric surface deviations by means of average radial profile

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3739, Issue , 1999, Pages 474-479

  Doerband, Bernd ^a  

^a CARL ZEISS SMT AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER CONTROL SYSTEMS; FABRICATION; INTEGRAL EQUATIONS; NUMERICAL CONTROL SYSTEMS; POLYNOMIALS; SPURIOUS SIGNAL NOISE; SURFACES;

ROTATIONAL SYMMETRIC SURFACE IRREGULARITIES; ZERNIKE POLYNOMIALS;

ASPHERICS;

EID: 0032646821     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (2)